High resolution three dimensional structural microscopy by single angle Bragg ptychography

TL;DR

This paper introduces 3D Bragg ptychography, a novel imaging technique that reconstructs nanoscale 3D structures and strain fields in crystalline materials from fixed-angle measurements, simplifying experimental procedures.

Contribution

The work presents a new methodology for 3D structural imaging that eliminates the need for sample rotation, combining Bragg peak data with scanning probe positions for reconstruction.

Findings

Successful numerical demonstration of the method

Analytical derivation of the reconstruction framework

Experimental reconstruction of lattice distortions in a nanoelectronic device

Abstract

We present an efficient method of imaging 3D nanoscale lattice behavior and strain fields in crystalline materials with a new methodology -- three dimensional Bragg projection ptychography (3DBPP). In this method, the 2D sample structure information encoded in a coherent high-angle Bragg peak measured at a fixed angle is combined with the real-space scanning probe positions to reconstruct the 3D sample structure. This work introduces an entirely new means of three dimensional structural imaging of nanoscale materials and eliminates the experimental complexities associated with rotating nanoscale samples. We present the framework for the method and demonstrate our approach with a numerical demonstration, an analytical derivation, and an experimental reconstruction of lattice distortions in a component of a nanoelectronic prototype device.