Synthesis of titanium-oxide nanoparticles with size and stoichiometry control

TL;DR

This paper presents a method to independently control the size and stoichiometry of titanium-oxide nanoparticles synthesized via hollow cathode sputtering, enabling tailored nanomaterials with specific properties.

Contribution

It introduces a novel synthesis technique allowing independent tuning of nanoparticle size and composition during Ti-O nanoparticle production.

Findings

Nanoparticles ranged from 25 to 75 nm in size.

Stoichiometry varied independently through gas flow control.

Crystalline phases of nanoparticles could be selectively synthesized.

Abstract

Ti-O nanoparticles have been synthesized via hollow cathode sputtering in an Ar-O2 atmosphere using high power pulsing. It is shown that the stoichiometry and the size of the nanoparticles can be varied independently, the former through controlling the O2 gas flow and the latter by the independent biasing of two separate anodes in the growth zone. Nanoparticles with diameters in the range of 25 to 75 nm, and with different Ti-O compositions and crystalline phases, have been synthesized.