hp-finite element method for simulating light scattering from complex 3D structures
S. Burger, L. Zschiedrich, J. Pomplun, S. Herrmann, F. Schmidt
TL;DR
This paper introduces an hp-finite element method for simulating light scattering from complex 3D structures, emphasizing accuracy and efficiency in optical applications like lithography.
Contribution
It presents a novel finite-element solver using unstructured 3D meshes and adaptive hp-refinement for electromagnetic simulations.
Findings
Accurate simulation of light scattering from nano-posts and FinFETs
Efficient computation with adaptive hp-refinement
Improved geometrical resolution in electromagnetic modeling
Abstract
Methods for solving Maxwell's equations are integral part of optical metrology and computational lithography setups. Applications require accurate geometrical resolution, high numerical accuracy and/or low computation times. We present a finite-element based electromagnetic field solver relying on unstructured 3D meshes and adaptive hp-refinement. We apply the method for simulating light scattering off arrays of high aspect-ratio nano-posts and FinFETs.
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