Atmospheric oxygen in Mn doped GaAs/GaAs(0 0 1) thin films grown by molecular beam epitaxy

TL;DR

This study investigates Mn-doped GaAs thin films grown by molecular beam epitaxy at different temperatures, revealing how growth conditions affect Mn distribution and oxygen incorporation.

Contribution

It provides detailed elemental depth profiles showing temperature-dependent Mn distribution and unexpected oxygen levels in low-temperature grown films.

Findings

Higher Mn near the surface at high temperatures

More uniform Mn distribution at low temperatures

High oxygen levels in low-temperature grown films

Abstract

Mn doped GaAs thin films were grown using molecular beam epitaxy at high and low substrate temperatures. The elemental concentration depth profiles in the thin films were determined by using Auger electron spectroscopy combined with ion etching. The Mn concentration is higher near the surface and then decreases with depth for films grown at high substrate temperatures. The Mn concentration profile is much more uniform when films are grown using a low substrate temperature. What was unexpectedly found are high levels of oxygen in the low substrate temperature grown thin films.