Film Coating Process Research and Characterization of TiN Coated Racetrack-type Ceramic Pipe

TL;DR

This study compares different TiN coating methods on ceramic pipes, analyzing their deposition rates and surface properties to optimize film quality and efficiency.

Contribution

It introduces a comparative analysis of TiN coating techniques and cathode types, highlighting the advantages of Ti plate cathodes for deposition rate improvement.

Findings

Ti plate cathodes significantly increase deposition rates.

Surface morphology varies with coating method.

AFM, SEM, XPS tests provide detailed film characterization.

Abstract

TiN film was coated on the internal face of racetrack-type ceramic pipe by three different methods: radio-frequency sputtering, DC sputtering and DC magnetron sputtering. The deposition rates of TiN film under different coating methods were compared. According to the AFM, SEM, XPS test results,these properties were analyzed, such as TiN film roughness and surface morphology. At the same time, the deposition rates were studied under two types' cathode, Ti wires and Ti plate. According to the SEM test results, Ti plate cathode can improve the TiN/Ti film deposition rate obviously.