Ultraviolet, Optical, and Near-IR Microwave Kinetic Inductance Detector Materials Developments
P. Szypryt, B. A. Mazin, B. Bumble, H. G. Leduc, and L. Baker

TL;DR
This paper discusses the development of large, high-yield microwave kinetic inductance detector arrays for ultraviolet, optical, and near-infrared astronomy, focusing on new materials and fabrication techniques to improve performance and reduce frequency collisions.
Contribution
It introduces novel fabrication methods and explores new superconducting materials to enhance MKID array size, yield, and energy resolution for astronomical applications.
Findings
Atomic layer deposition improves titanium nitride film uniformity.
New material systems like platinum silicide show promise for MKID performance.
Strategies to reduce frequency collisions increase array yield.
Abstract
We have fabricated 2024 pixel microwave kinetic inductance detector (MKID) arrays in the ultraviolet/optical/near-IR (UVOIR) regime that are currently in use in astronomical instruments. In order to make MKIDs desirable for novel instruments, larger arrays with nearly perfect yield need to be fabricated. As array size increases, however, the percent yield often decreases due to frequency collisions in the readout. The per-pixel performance must also be improved, namely the energy resolution. We are investigating ways to reduce frequency collisions and to improve the per pixel performance of our devices through new superconducting material systems and fabrication techniques. There are two main routes that we are currently exploring. First, we are attempting to create more uniform titanium nitride films through the use of atomic layer deposition rather than the more traditional sputtering…
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