Performance predictions for a laser intensified thermal beam for use in high resolution Focused Ion Beam instruments
S. H. W. Wouters (1), G. ten Haaf (1), R. P. M. J. W. Notermans (1),, N. Debernardi (1), P. H. A. Mutsaers (1), O. J. Luiten (1), E. J. D., Vredenbregt (1) ((1) Department of Applied Physics, Eindhoven University of, Technology)

TL;DR
This paper demonstrates through calculations and simulations that a compact laser-cooled atomic beam can produce a high-brightness ion source for Focused Ion Beam instruments, surpassing current technologies in brightness.
Contribution
It introduces a novel approach using a 2D magneto-optical compressor to generate a high-brightness ion beam from a thermal source, with detailed performance predictions.
Findings
Achieves a brightness of 2.1 x 10^7 A/(m^2 sr eV) at 1 nA current
Uses a 5 cm long 2D magneto-optical compressor
Surpasses current liquid metal ion source brightness by over an order of magnitude
Abstract
Photo-ionization of a laser-cooled and compressed atomic beam from a high-flux thermal source can be used to create a high-brightness ion beam for use in Focus Ion Beam (FIB) instruments. Here we show using calculations and Doppler cooling simulations that an atomic rubidium beam with a brightness of at a current of 1 nA can be created using a compact 5 cm long 2D magneto-optical compressor which is more than an order of magnitude better than the current state of the art Liquid Metal Ion Source.
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