Extreme ultraviolet spectrometer based on a transmission electron microscopy grid

TL;DR

This paper introduces an extreme ultraviolet spectrometer utilizing a transmission electron microscopy grid as a dispersive element, capable of resolving high harmonic spectra from 60 to 27 nm with sub-2 nm resolution.

Contribution

The study demonstrates the application of a TEM mesh as a novel dispersive element in EUV spectroscopy, achieving high resolution over a broad spectral range.

Findings

Achieved spectral resolution under 2 nm across 60-27 nm range

Successfully dispersed high harmonic spectra from 13th to 29th harmonic

Validated the usefulness of TEM mesh in EUV spectrometry

Abstract

We performed extreme ultraviolet spectroscopy using an 80 lines/mm TEM mesh as dispersive element. We present the usefulness of this instrument for dispersing a high harmonic spectrum from the 13th to the 29th harmonic of a Ti:Sapph laser, corresponding to a wavelength range from 60 to 27 nm. The resolution of the instrument is limited by the image size of the high harmonic generation region on the detector. The best resolution in first order diffraction is under 2 nm over the entire spectral range.