Hybrid quantum circuit with implanted erbium ions
S. Probst, N. Kukharchyk, H. Rotzinger, A. Tkalcec, S. W\"unsch, A. D., Wieck, M. Siegel, A. V. Ustinov, P. A. Bushev

TL;DR
This paper demonstrates the integration of implanted erbium ion ensembles in Y$_2$SiO$_5$ with superconducting microwave resonators, showing tunable coupling and confirming their paramagnetic properties for hybrid quantum circuits.
Contribution
It introduces a method for focused ion beam implantation of erbium ions into Y$_2$SiO$_5$ and integrates these ensembles with superconducting resonators, advancing hybrid quantum circuit technology.
Findings
Coupling strength varies from 5 MHz to 18.7 MHz.
Linewidths range between 50 MHz and 130 MHz.
Implanted ensembles exhibit paramagnetic behavior.
Abstract
We report on hybrid circuit QED experiments with focused ion beam implanted Er ions in YSiO coupled to an array of superconducting lumped element microwave resonators. The YSiO crystal is divided into several areas with distinct erbium doping concentrations, each coupled to a separate resonator. The coupling strength is varied from 5 MHz to 18.7 MHz, while the linewidth ranges between 50 MHz and 130 MHz. We confirm the paramagnetic properties of the implanted spin ensemble by evaluating the temperature dependence of the coupling. The efficiency of the implantation process is analyzed and the results are compared to a bulk doped Er:YSiO sample. We demonstrate the successful integration of these engineered erbium spin ensembles with superconducting circuits.
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