A new cantilever beam-rigid-body MEMS gyroscope: mathematical model and linear dynamics
Seyed Amir Mousavi Lajimi, Glenn Heppler, Eihab Abdel-Rahman
TL;DR
This paper introduces a novel MEMS gyroscope with a microbeam and eccentric rigid-body, analyzing its static and dynamic behaviors, sensitivity, and parameter effects to enhance understanding of its operation.
Contribution
It presents a new mathematical model for a microbeam-rigid-body MEMS gyroscope and studies its static and dynamic responses, including sensitivity analysis.
Findings
The gyroscope's static and dynamic behaviors are characterized.
System parameters significantly influence the sensor's response.
The model provides insights into optimizing gyroscope performance.
Abstract
A new microbeam-rigid-body gyroscope is introduced and its static and dynamic behaviours are studied. The main structure includes a microbeam and an eccentric end-rigid-body influencing the dynamic and static characteristics of the sensor. The sensitivity of the device and the effect of system parameters on the microsystem's response are investigated.
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Taxonomy
TopicsAdvanced MEMS and NEMS Technologies · Mechanical and Optical Resonators · Photonic and Optical Devices