Circuit Electromechanics with a Non-Metallized Nanobeam

TL;DR

This paper reports the development of a silicon nitride nanobeam coupled to a superconducting microwave resonator, demonstrating high quality factors and quantifying electromechanical coupling for potential quantum applications.

Contribution

It introduces a novel nano-electromechanical system with a non-metallized nanobeam and provides detailed characterization and modeling of its electromechanical properties.

Findings

Achieved a quality factor of 480,000 at 14 MHz

Measured electromechanical vacuum coupling of 11.5 mHz

Validated experimental results with finite element models

Abstract

We have realized a nano-electromechanical hybrid system consisting of a silicon nitride beam dielectrically coupled to a superconducting microwave resonator. We characterize the sample by making use of the Duffing nonlinearity of the strongly driven beam. In particular, we calibrate the amplitude spectrum of the mechanical motion and determine the electromechanical vacuum coupling. A high quality factor of 480,000 at a resonance frequency of 14 MHz is achieved at 0.5 K. The experimentally determined electromechanical vacuum coupling of 11.5 mHz is quantitatively compared with finite element based model calculations.