Coupling of a locally implanted rare-earth ion ensemble to a superconducting micro-resonator
I.Wisby, S. E. de Graaf, R. Gwilliam, A. Adamyan, S. Kubatkin, P. J., Meeson, A. Ya. Tzalenchuk, T. Lindstr\"om

TL;DR
This paper demonstrates the successful coupling of locally implanted Gd$^{3+}$ ions in Al$_{2}$O$_{3}$ to a superconducting NbN micro-resonator, maintaining high quality factors and enabling detailed spectroscopy of the spin-resonator interaction.
Contribution
It introduces a controlled ion implantation method to couple rare-earth ions to superconducting resonators without degrading their quality, advancing hybrid quantum device fabrication.
Findings
Achieved coupling rates of about 1 MHz.
Maintained resonator quality factors above 10^5.
Observed electron-spin resonances consistent with models.
Abstract
We demonstrate the coupling of rare-earth ions locally implanted in a substrate (Gd in AlO) to a superconducting NbN lumped-element micro-resonator. The hybrid device is fabricated by a controlled ion implantation of rare-earth ions in well-defined micron-sized areas, aligned to lithographically defined micro-resonators. The technique does not degrade the internal quality factor of the resonators which remain above . Using microwave absorption spectroscopy we observe electron-spin resonances in good agreement with numerical modelling and extract corresponding coupling rates of the order of MHz and spin linewidths of MHz.
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