Photoluminescence of focused ion beam implanted Er$^{3+}$:Y$_{2}$SiO$_{5}$ crystals
Nadezhda Kukharchyk, Shovon Pal, Jasper R\"odiger, Arne Ludwig,, Sebastian Probst, Alexey Ustinov, Pavel Bushev, Andreas Dirk Wieck

TL;DR
This study investigates the photoluminescence properties of Er$^{3+}$ ions implanted into Y$_2$SiO$_5$ crystals using focused ion beam, aiming to optimize local doping techniques for quantum applications.
Contribution
It demonstrates the use of focused ion beam implantation for local doping of Er$^{3+}$ in Y$_2$SiO$_5$ and evaluates the implantation efficiency and activation dependence on fluence.
Findings
Photoluminescence indicates successful local doping.
Implantation efficiency varies with fluence.
Post-implantation annealing affects ion activation.
Abstract
Erbium doped low symmetry YSiO crystals attract a lot of attention in perspective of quantum information applications. However, only doping of the samples during growth is available up to now, which yields a quite homogeneous doping density. In the present work, we deposit Er-ions by the focused ion beam technique at Yttrium sites with several fluences in one sample. With a photoluminescence study of these locally doped Er:YSiO crystals, we are able to evaluate the efficiency of the implantation process and develop it for the highest efficiency possible. We observe the dependence of the ion activation after the post-implantation annealing on the fluence value.
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