Photon-noise limited sensitivity in titanium nitride kinetic inductance detectors
Johannes Hubmayr, Jim Beall, Dan Becker, Hsaio-Mei Cho, Mark Devlin,, Bradley Dober, Chris Groppi, Gene C. Hilton, Kent D. Irwin, Dale Li, Phillip, Mauskopf, Dave P. Pappas, Jeff Van Lanen, Michael R. Vissers, Yiwen Wang,, Lian-Fu Wei, Jiansong Gao

TL;DR
This paper demonstrates that titanium nitride kinetic inductance detectors can achieve photon-noise limited sensitivity at sub-millimeter wavelengths, making them suitable for broadband photometry.
Contribution
It introduces a TiN/Ti/TiN trilayer superconducting film MKID with optimized backshort for efficient coupling and photon-noise limited performance at 250 microns.
Findings
Photon-noise limited performance achieved at incident powers > 0.5 pW
Noise equivalent power > 3×10^{-17} W/√Hz
Suitable for broadband sub-millimeter photometric applications
Abstract
We demonstrate photon-noise limited performance at sub-millimeter wavelengths in feedhorn-coupled, microwave kinetic inductance detectors (MKIDs) made of a TiN/Ti/TiN trilayer superconducting film, tuned to have a transition temperature of 1.4~K. Micro-machining of the silicon-on-insulator wafer backside creates a quarter-wavelength backshort optimized for efficient coupling at 250~\micron. Using frequency read out and when viewing a variable temperature blackbody source, we measure device noise consistent with photon noise when the incident optical power is ~0.5~pW, corresponding to noise equivalent powers ~3 W/. This sensitivity makes these devices suitable for broadband photometric applications at these wavelengths.
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