Highly Unidirectional Uniform Optical Grating Couplers, Fabricated in Standard 45nm SOI-CMOS Foundry Process

TL;DR

This paper presents a novel design for highly unidirectional uniform optical grating couplers fabricated using standard 45nm SOI-CMOS technology, aiming to improve optical coupling efficiency.

Contribution

It introduces a new grating coupler design compatible with standard CMOS processes, enhancing unidirectionality and uniformity for integrated photonics.

Findings

Achieved high unidirectionality in optical coupling

Demonstrated fabrication in standard 45nm SOI-CMOS process

Improved coupling efficiency compared to previous designs

Abstract

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