Enhanced interaction between a mechanical oscillator and two coupled resonant electrical circuits

TL;DR

This paper presents both calculation and experimental results on a coupled electromechanical system with a high-Q mechanical oscillator and two RF circuits, demonstrating enhanced interaction suitable for sensitive vibration sensing.

Contribution

It introduces a novel coupled RF circuit and mechanical oscillator system operating in the resolved sideband regime, enhancing electromechanical interaction for sensing applications.

Findings

Enhanced electromechanical coupling observed

System operates effectively in the resolved sideband regime

Potential for high-sensitivity capacitive vibration sensing

Abstract

This paper reports result of calculation and experimental realization of an electromechanical system that consists of a high-Q mechanical oscillator parametrically coupled in the manner of a capacitive transducer with a RF circuit, which is in turn inductively coupled with another RF circuit. The system operates in the resolved sideband regime when the mechanical oscillator's frequency is larger than the electrical circuits' bandwidths. Using two coupled RF circuits allowed one to enhance the interaction between them and the mechanical oscillator which is one of flexural vibrational modes of a free-edge circular silicon wafer. Such a coupled electromechanical system can be used as a high-sensitive capacitive vibration sensor.