Order quantification of hexagonal periodic arrays fabricated by in situ solvent-assisted nanoimprint lithography of block copolymers
Claudia Simao, Worawut Khunsin, Nikolaos Kehagias, Mathieu Salaun,, Marc Zelsmann, Michael A. Morris, Clivia M. Sotomayor Torres
TL;DR
This paper presents a method for quantifying the order in hexagonal periodic arrays created by solvent-assisted nanoimprint lithography of block copolymers, enabling better control and analysis of nanoscale pattern formation.
Contribution
The study introduces a novel order quantification technique for hexagonal arrays fabricated via in situ solvent-assisted nanoimprint lithography of block copolymers.
Findings
Successful fabrication of hexagonal arrays using SAIL
Quantitative assessment of array order achieved
Potential for improved nanoscale pattern control
Abstract
Directed self-assembly of block copolymer polystyrene-b-polyethylene oxide (PS-b-PEO) thin film was achieved by one-pot methodology of solvent vapour assisted nanoimprint lithography (SAIL).
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Taxonomy
TopicsBlock Copolymer Self-Assembly · Nanofabrication and Lithography Techniques · Liquid Crystal Research Advancements