Freeform high-speed large-amplitude deformable Piezo Mirrors

TL;DR

This paper introduces a novel tunable freeform deformable piezo mirror capable of high-speed, large-amplitude displacements with complex profiles, suitable for advanced optical applications.

Contribution

It presents a new design and fabrication method for freeform piezo mirrors with large displacements and high frequencies, including various scalable prototypes.

Findings

Achieved displacements of several hundred micrometers

Operates at frequencies close to 1 kHz

Optical quality sufficient for diffraction pattern demonstration

Abstract

We present a new type of tunable mirror with sharply-featured freeform displacement profiles, large displacements of several 100\mu m and high operating frequencies close to the kHz range at 15mm diameter. The actuation principle is based on a recently explored "topological" displacement mode of piezo sheets. The prototypes presented here include a rotationally symmetric axicon, a hyperbolic sech-icon and a non-symmetric pyram-icon and are scalable to smaller dimensions. The fabrication process is economic and cleanroom-free, and the optical quality is sufficient to demonstrate the diffraction patterns of the optical elements.