Nanomechanical resonant structures in single-crystal diamond

TL;DR

This paper investigates the mechanical resonance properties of single-crystal diamond nanobeams, revealing stress effects and high-quality factors, laying groundwork for future quantum and classical nanomechanical devices.

Contribution

It provides the first detailed characterization of resonance frequencies and Q-factors in diamond nanobeams fabricated by angled-etching, highlighting stress effects and potential applications.

Findings

Resonance frequencies indicate significant compressive stress in doubly clamped nanobeams.

Cantilever modes follow inverse-length-squared trend.

Q-factors around 10^4 in high vacuum.

Abstract

With its host of outstanding material properties, single-crystal diamond is an attractive material for nanomechanical systems. Here, the mechanical resonance characteristics of freestanding, single-crystal diamond nanobeams fabricated by an angled-etching methodology are reported. Resonance frequencies displayed evidence of significant compressive stress in doubly clamped diamond nanobeams, while cantilever resonance modes followed the expected inverse-length-squared trend. Q-factors on the order of 104 were recorded in high vacuum. Results presented here represent initial groundwork for future diamond-based nanomechanical systems which may be applied in both classical and quantum applications.