Single-exposure profilometry using partitioned aperture wavefront imaging

TL;DR

This paper introduces a rapid, high-resolution surface profilometry method using partitioned aperture wavefront imaging combined with a standard reflection microscope, enabling real-time topography measurements over large areas.

Contribution

The work presents a novel, instantaneous surface topography measurement technique that achieves nanometer axial and sub-micron lateral resolution at video rates, surpassing traditional methods.

Findings

Operates at video rate with large fields of view

Achieves nanometer axial and sub-micron lateral resolution

Compared favorably with scanning white light interferometry

Abstract

We demonstrate a technique for instantaneous measurements of surface topography based on the combination of a partitioned aperture wavefront imager with a standard lamp-based reflection microscope. The technique can operate at video rate over large fields of view, and provides nanometer axial resolution and sub-micron lateral resolution. We discuss performance characteristics of this technique, which we experimentally compare with scanning white light interferometry.