3D Technologies for Large Area Trackers
G. Deptuch, U. Heintz, M. Johnson, C. Kenney, R. Lipton, M. Narian, S., Parker, A. Shenai, L. Spiegel, J. Thom, Z. Ye

TL;DR
This paper discusses the development of wafer-scale 3D electronics and sensor technologies for creating large, low-cost, pixelated tracking detectors with high yield, minimal dead area, and improved electrical performance.
Contribution
It introduces a novel approach to large area trackers using wafer-scale 3D integration, enabling fully active sensor/readout tiles with better performance and manufacturability.
Findings
Potential for large area, low-cost detector production
Enhanced electrical performance through through-bulk connections
High-yield assembly of active sensor tiles
Abstract
We describe technologies which can be developed to produce large area, low cost pixelated tracking detec- tors. These utilize wafer-scale 3D electronics and sensor technologies currently being developed in industry. This can result in fully active sensor/readout chip tiles which can be assembled into large area arrays with good yield and minimal dead area. The ability to connect though the bulk of the device can also provide better electrical performance and lower mass.
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Taxonomy
TopicsParticle Detector Development and Performance · CCD and CMOS Imaging Sensors · 3D IC and TSV technologies
