Micromanipulation transfer of membrane resonators for circuit optomechanics

TL;DR

This paper introduces a micromanipulation technique for transferring membrane resonators onto microwave cavities, enabling improved control and measurement of their vibrational properties for circuit optomechanics.

Contribution

It presents a novel micromanipulation method for membrane transfer that reduces clamping losses and maintains strong capacitive coupling in circuit optomechanics experiments.

Findings

Membranes vibrate as free-free resonators.

Sliding clamping conditions cause Duffing nonlinearity.

Method enables better control of resonator coupling.

Abstract

A capacitive coupling between mechanical resonator and a microwave cavity enables readout and manipulation of the vibrations. We present a setup to carry out such experiments with aluminum membranes fabricated as stamps and transferred in place with micromanipulation. The membrane is held in place by van der Waals forces, and is supported by three microscopic points. We measure the lowest mechanical modes, and conclude the membrane vibrates as an essentially free-free resonator. Sliding clamping conditions are identified via a softening Duffing nonlinearity. The method will enable reduction of clamping losses, while maintaining a narrow vacuum gap for strong capacitive coupling.