Thin films thickness Measurement by the conductivity theory in the framework of born approximation

TL;DR

This paper presents a method to estimate thin film thickness using conductivity measurements within the Born approximation framework, emphasizing simplicity and repeatability for accurate material and morphological analysis.

Contribution

It introduces an inverse conductivity-based approach for thin film thickness estimation that requires only conductivity measurements, applicable across different frequencies for improved accuracy.

Findings

Good consistency with other thickness measurement methods

Method is simple and relies solely on conductivity measurements

Applicable to AC currents with various frequencies for enhanced precision

Abstract

When the thickness of the layer is smaller than the electrons mean free path, the morphology affects the conductivity directly based on the layer thickness. This issue provides basis in order to estimate the thickness of the layer by understanding the morphology and the value of the conductivity. This method is an inverse approach on thickness estimation and is applied to various samples. The comparison of the results with other thickness estimations shows good consistency. The benefits of this approach is that the only parameter that needs to be measured is the conductivity, which is quite trivial. Despite the simplicity of this approach, its results would prove adequate to study both the material properties and the morphology of the layer. In addition, the possibility of repeating the measurements on thickness for AC currents with various frequencies enables averaging the measurements in order to obtain the most precise results.