Parameter Extraction and Support-Loss in MEMS Resonators

TL;DR

This paper presents a simple method to extract equivalent circuit parameters and support-loss Q-factors of MEMS resonators using eigenfrequency simulation and matched boundary layers, validated by experiments and analytic results.

Contribution

It introduces a novel, efficient approach for parameter extraction and support-loss estimation in MEMS resonators, reducing simulation time significantly.

Findings

Method accurately predicts support-loss Q-factors.

Results align well with measurements and analytic models.

Significantly reduces simulation time for MEMS resonator analysis.

Abstract

In this paper it is shown how the equivalent circuit parameters of a MEMS resonator can be simply obtained from an eigenfrequency simulation. Additionally, it is demonstrated that the Q-factor as a result of support losses in a MEMS resonator can be determined using a matched boundary layer. The method is applied to calculate the frequency dependent admittance of a diamond disk resonator. Results agree well with measurements and analytic results. Comparison to a frequency response analysis establishes the validity of the method and shows that it results in a large reduction of the simulation time.