Niobium-based superconducting nano-devices fabrication using all-metal suspended masks
S. Samaddar, D. van Zanten, A. Fay, B. Sac\'ep\'e, H. Courtois and, C.B. Winkelmann
TL;DR
This paper introduces a new fabrication method for niobium superconducting nanodevices using all-metal suspended masks, overcoming traditional lithography challenges and demonstrated through the creation of superconducting lines and proximity SQUIDs.
Contribution
It presents a novel all-metal mask technique for niobium nanodevice fabrication, improving patterning quality over conventional organic resist methods.
Findings
Successful fabrication of long, narrow superconducting niobium lines
Realization of niobium-gold-niobium proximity SQUIDs
Demonstration of high-quality device performance
Abstract
We report a novel method for the fabrication of superconducting nanodevices based on niobium. The well-known difficulties of lithographic patterning of high-quality niobium are overcome by replacing the usual organic resist mask by a metallic one. The quality of the fabrication procedure is demonstrated by the realization and characterization of long and narrow superconducting lines and niobium-gold-niobium proximity SQUIDs.
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