Fast simulation method for parameter reconstruction in optical metrology
S. Burger, L. Zschiedrich, J. Pomplun, F. Schmidt, B. Bodermann
TL;DR
This paper introduces a finite-element based simulation method that efficiently computes parameter derivatives of light scattering signals, enhancing optical metrology applications like design optimization and sensitivity analysis.
Contribution
The paper presents a novel finite-element method for automatic derivative computation in optical scattering, validated through convergence studies and applied to sensitivity analysis.
Findings
Validated in convergence studies
Improves computational efficiency
Applicable to parameter sensitivity analysis
Abstract
A method for automatic computation of parameter derivatives of numerically computed light scattering signals is demonstrated. The finite-element based method is validated in a numerical convergence study, and it is applied to investigate the sensitivity of a scatterometric setup with respect to geometrical parameters of the scattering target. The method can significantly improve numerical performance of design optimization, parameter reconstruction, sensitivity analysis, and other applications.
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