High-resolution x-ray analysis with multilayer gratings
Philippe Jonnard (LCP-MR), Karine Le Guen (LCP-MR), Jean-Michel, Andr\'e (LCP-MR)

TL;DR
This paper demonstrates that multilayer gratings significantly enhance x-ray spectral resolution, enabling the distinction of closely spaced emission lines and chemical states in soft x-ray analysis.
Contribution
The study introduces multilayer gratings as a novel approach to improve spectral resolution in soft x-ray analysis, surpassing traditional multilayers.
Findings
Successfully distinguished Fe L extalpha and Leta lines separated by 13 eV.
Resolved F K and Fe L emissions in mixed samples.
Showed chemical state sensitivity of C K emission bands.
Abstract
Periodic multilayers are nowadays widely used to perform x-ray analysis in the soft x-ray range (photon energy lower than 1 keV). However, they do not permit to obtain high-resolution spectra like natural or synthetic crystals. Thus, multilayers cannot resolve interferences between close x-ray lines. It has been shown and demonstrated experimentally that patterning a grating profile within a multilayer structure leads to a diffractive optics with improved resolving power. We illustrate the use of a Mo/B4C multilayer grating in the Fe L and C K spectral ranges, around 700 eV and 280 eV respectively. First, in the Fe L range, the improved spectral resolution enables us to distinguish the Fe L\alpha and L\beta emissions (separated by 13 eV). In addition, using a sample made of a mix of LiF and an iron ore, we show that it is possible to easily resolve the F K and Fe L emissions. These…
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