Design of a surface acoustic wave mass sensor in the 100 GHz range
Damiano Nardi, Elisa Zagato, Gabriele Ferrini, Claudio Giannetti, and, Francesco Banfi

TL;DR
This paper proposes a novel photoacoustic mass sensor operating above 100 GHz using impulsive optical excitation and EUV detection, enabling high-frequency operation without piezoelectric substrates.
Contribution
It introduces a new design for surface acoustic wave sensors in the 100 GHz range based on surface phononic crystals and optical detection methods.
Findings
Operates above 100 GHz frequency range
Eliminates need for piezoelectric substrates
Offers enhanced sensitivity and miniaturization
Abstract
A design for photoacoustic mass sensors operating above 100 GHz is proposed. The design is based on impulsive optical excitation of a pseudosurface acoustic wave in a surface phononic crystal with nanometric periodic grating, and on time-resolved extreme ultraviolet detection of the pseudosurface acoustic wave frequency shift upon mass loading the device. The present design opens the path to sensors operating in a frequency range currently unaccessible to electro-acoustical transducers, providing enhanced sensitivity, miniaturization and incorporating time-resolving capability while forgoing the piezoelectric substrate requirement.
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