CMOS-Compatible Nanowire Biosensors

TL;DR

This paper discusses CMOS-compatible silicon nanowire biosensors, highlighting their functionalization with antibodies and the use of frequency-based signals for low-cost, integrated biochemical sensing.

Contribution

It introduces a CMOS-compatible fabrication process for silicon nanowire biosensors with antibody functionalization and frequency-based interrogation methods.

Findings

Successful conjugation of monoclonal antibodies to nanowires

Implementation of frequency-based signal interrogation

Potential for low-cost, integrated biosensor systems

Abstract

In this chapter, silicon nanowires that are compatible with CMOS fabrication processes have been described. It has been shown that these nanowires can be functionalized by conjugating monoclonal antibodies to their surface in order to build sensitive biochemical sensors. It has also been shown that by using frequency-based signals, all the necessary components to interrogate these nanowires can be built on low-cost CMOS processes.