Image Registration for Stability Testing of MEMS

TL;DR

This paper presents a novel application of wavelet-based image registration algorithms to evaluate the stability of MEMS devices, specifically applied to the MicroShutters Subsystem of JWST's NIRSpec instrument.

Contribution

It introduces a new methodology for MEMS stability assessment using image registration, bridging engineering and computer science applications.

Findings

Successful application of wavelet-based registration to MEMS stability testing

Demonstrated stability evaluation of JWST's MicroShutters Subsystem

Provides a new tool for MEMS device analysis

Abstract

Image registration, or alignment of two or more images covering the same scenes or objects, is of great interest in many disciplines such as remote sensing, medical imaging, astronomy, and computer vision. In this paper, we introduce a new application of image registration algorithms. We demonstrate how through a wavelet based image registration algorithm, engineers can evaluate stability of Micro-Electro-Mechanical Systems (MEMS). In particular, we applied image registration algorithms to assess alignment stability of the MicroShutters Subsystem (MSS) of the Near Infrared Spectrograph (NIRSpec) instrument of the James Webb Space Telescope (JWST). This work introduces a new methodology for evaluating stability of MEMS devices to engineers as well as a new application of image registration algorithms to computer scientists.