Measurement of specific contact resistivity using scanning voltage probes
Weigang Wang, Malcolm R. Beasley

TL;DR
This paper introduces a simplified method using scanning voltage probes to measure specific contact resistivity, reducing complexity in fabrication and analysis, and validates it with experimental data on graphene.
Contribution
The paper proposes a new, straightforward approach for measuring specific contact resistivity using a simplified geometry and scanning voltage probes, validated by experimental data.
Findings
The method accurately deduces contact resistivity from potential variation.
Experimental validation on graphene supports the model.
Simplifies traditional measurement procedures.
Abstract
Specific contact resistivity measurements have conventionally been heavy in both fabrication and simulation/calculation in order to account for complicated geometries and other effects such as parasitic resistance. We propose a simpler geometry to deliver current, and the use of a scanning voltage probe to sense the potential variation along the sample surface, from which the specific contact resistivity can be straightforwardly deduced. We demonstrate an analytical example in the case where both materials are thin films. Experimental data with a scanning Kelvin probe measurement on graphene from the literature corroborates our model calculation.
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