Copper passivation procedure for water-filled copper cells for applications in metrology
Bruno Bu\'ee (1), Alexandre Verg\'e (1), Vladimir Vidal (1), Eric, Georgin (2), Fernando Sparasci (1) ((1) LNE-CNAM, La Plaine Saint-Denis,, France, (2) LNE-CETIAT, Villeurbanne, France)

TL;DR
This paper presents a novel copper passivation and filling procedure for water-filled copper cells used in metrology, aiming to improve the accuracy and stability of water vapour pressure and triple point temperature measurements.
Contribution
It introduces a new passivation and cleaning method for copper cells, enhancing measurement precision in humidity and thermometry standards.
Findings
Improved measurement stability and reproducibility.
Reduced water contamination in copper cells.
Enhanced thermal response and uniformity.
Abstract
In the framework of the European research project MeteoMet, the LNE-CNAM and the LNE-CETIAT are developing novel copper cells for the determination of the water vapour pressure equation and the measurement of the triple point of water temperature at the highest degree of accuracy. The Water Vapour Pressure Equation (WVPE) is the basic formula for the calculation of the vapour pressure and other humidity related quantities. Improvement in the uncertainty of the water vapour formulation in the temperature range between -80^{\cdot}C (and possibly down to -90^{\cdot}C) and +100^{\cdot}C is needed for the improvement of primary standards in the field of hygrometry. The Triple Point of Water (TPW, temperature 273,16 K) plays a key role in thermometry, because of its threefold function. On one side, it defines the temperature unit, the kelvin. On the other side, it is the reference point in…
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Taxonomy
TopicsCopper Interconnects and Reliability · Advancements in Photolithography Techniques
