Femtosecond laser nanostructuring in glass with sub-50nm feature sizes

TL;DR

This paper demonstrates precise femtosecond laser nanostructuring in glass, achieving sub-50nm features and enabling 3D nanofluidic structures through controlled laser parameters.

Contribution

It introduces a method for controllable nanostructure fabrication in glass with sub-50nm features using femtosecond laser direct writing.

Findings

Achieved hollow nano-voids of ~40 nm lateral size

Controlled nanostructure dimensions via laser intensity and polarization

Enabled direct construction of 3D nanofluidic channels in glass

Abstract

We report on controllable production of nanostructures embedded in a porous glass substrate by femtosecond laser direct writing. We show that a hollow nano-void with a lateral size of ~40 nm and an axial size of ~1500 nm can be achieved by manipulating the peak intensity and polarization of the writing laser beam. Our finding enables direct construction of 3D nanofluidics inside glass.