Field-effect transistors and intrinsic mobility in ultra-thin MoSe2 layers
S. Larentis, B. Fallahazad, E. Tutuc

TL;DR
This paper demonstrates the fabrication of ultra-thin MoSe2 FETs with high gate modulation and investigates their intrinsic mobility and conductivity, revealing phonon scattering as a key factor affecting performance.
Contribution
It provides the first detailed measurement of intrinsic mobility and conductivity in ultra-thin MoSe2 FETs, highlighting the impact of Schottky barriers and phonon scattering.
Findings
High On/Off ratio (>10^6) in MoSe2 FETs
Asymmetric device characteristics due to Schottky barriers
Mobility strongly dependent on temperature, indicating phonon scattering
Abstract
We report the fabrication of back-gated field-effect transistors (FETs) using ultra-thin, mechanically exfoliated MoSe2 flakes. The MoSe2 FETs are n-type and possess a high gate modulation, with On/Off ratios larger than 106. The devices show asymmetric characteristics upon swapping the source and drain, a finding explained by the presence of Schottky barriers at the metal contact/MoSe2 interface. Using four-point, back-gated devices we measure the intrinsic conductivity and mobility of MoSe2 as a function of gate bias, and temperature. Samples with a room temperature mobility of ~50 cm2/V.s show a strong temperature dependence, suggesting phonons are a dominant scattering mechanism.
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