Electronic transport in two dimensional Si:P $\delta$-doped layers
E. H. Hwang, S. Das Sarma

TL;DR
This paper theoretically studies 2D electronic transport in Si:P delta-doped layers, revealing unique non-monotonic mobility behavior and differences from Si-MOSFETs, with implications for understanding dopant scattering effects.
Contribution
It provides a novel theoretical analysis of density-dependent mobility in Si:P delta-doped layers, highlighting contrasting behavior with Si-MOSFETs and exploring the roles of screening and layer width.
Findings
Mobility decreases then increases with density, opposite to Si-MOSFETs.
Mobility inversely proportional to density at low densities.
Transport scattering time can be much larger than single-particle relaxation time.
Abstract
We investigate theoretically 2D electronic transport in Si:P -doped layers limited by charged-dopant scattering. Since the carrier density is approximately equal to the dopant impurity density, the density dependent transport shows qualitatively different behavior from that of the well-studied 2D Si-MOSFETs where the carrier density is independent of the impurity density. We find that the density dependent mobility of the Si:P system shows non-monotonic behavior which is exactly opposite of the non-monotonicity observed in Si-MOSFETs --- in the Si:P system the mobility first decreases with increasing density and then it increases slowly with increasing density above a typical density cm (in contrast to Si MOSFETs where the mobility typically increases with density first and then slowly decreases at high density as surface roughness scattering dominates). In the…
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