Comparison of different sources for laboratory X-ray microscopy

TL;DR

This paper compares two laboratory X-ray microscopy setups, demonstrating 100 nm resolution and exploring 3D imaging capabilities with initial imaging examples of various specimens.

Contribution

It introduces and evaluates two different X-ray microscopy configurations using geometric magnification, including target structuring and imaging results.

Findings

Achieved 100 nm resolution in both setups

Demonstrated 3D imaging with computed tomography

Provided initial imaging examples of different specimen types

Abstract

This paper describes the setup of two different solutions for laboratory X-ray microscopy working with geometric magnification. One setup uses thin-film transmission targets with an optimized tungsten-layer thickness and the electron gun and optics of an electron probe micro analyzer to generate a very small X-ray source. The other setup is based on a scanning electron microscope and uses microstructured reflection targets. We also describe the structuring process for these targets. In both cases we show that resolutions of 100 nm can be achieved. Also the possibilities of computed tomography for 3D imaging are explored and we show first imaging examples of high-absorption as well as low-absorption specimens to demonstrate the capabilities of the setups.