Preparation of atomically-flat SrTiO3 surfaces using a deionized-water etching and thermal annealing procedure
J. G. Connell, B. J. Isaac, D. R. Strachan, and S. S. A. Seo

TL;DR
This paper presents a simple, acid-free method using deionized water etching and thermal annealing to produce atomically-flat, singly-terminated SrTiO3 surfaces, improving substrate preparation for oxide interface studies.
Contribution
The study introduces an effective, environmentally friendly technique for preparing atomically-flat SrTiO3 surfaces without acids, enhancing substrate quality for complex oxide research.
Findings
Successful creation of atomically-flat, singly-terminated surfaces
Effective removal of surface contaminants like strontium oxide
Technique promotes better oxide interface studies
Abstract
We report that a deionized water etching and thermal annealing technique can be effective for preparing atomically-flat and singly-terminated surfaces of single crystalline SrTiO3 substrates. After a two-step thermal-annealing and deionized-water etching procedure, topography measured by atomic force microscopy shows the evolution of substrates from a rough to step-terraced surface structure. Lateral force microscopy confirms that the atomically-flat surfaces are singly-terminated. Moreover, this technique can be used to remove excessive strontium oxide or hydroxide composites segregated on the SrTiO3 surface. This acid-etchant-free technique facilitates the preparation of atomically-aligned SrTiO3 substrates, which promotes studies on two-dimensional physics of complex oxide interfaces.
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