Fabrication of thin diamond membranes for photonic applications
Jonathan C. Lee, Andrew P. Magyar, David O. Bracher, Igor Aharonovich, and Evelyn L. Hu
TL;DR
This paper presents a detailed method for fabricating thin, optically-active diamond membranes with nitrogen-vacancy centers using ion implantation and overgrowth, demonstrating their suitability for photonic applications.
Contribution
It introduces a novel fabrication process for thin diamond membranes with NV centers suitable for photonics and bio-sensing.
Findings
Fabricated photonic crystal cavities with quality factor of 1000
Demonstrated the optical activity of the membranes
Validated the membranes' suitability for photonic applications
Abstract
High quality, thin diamond membranes containing nitrogen-vacancy centers provide critical advantages in the fabrication of diamond-based structures for a variety of applications, including wide field magnetometry, photonics and bio-sensing. In this work we describe, in detail, the generation of thin, optically-active diamond membranes by means of ion implantation and overgrowth. To establish the suitability of our method for photonic applications, photonic crystal cavities with quality factor of 1000 are fabricated.
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