Analysis of Dual-beam Asymmetrical Torsional Bi-Material Cantilever for Temperature Sensing Applications

TL;DR

This paper presents a highly sensitive MEMS temperature sensor based on a dual-beam asymmetrical bi-material cantilever that utilizes torsional deflection for precise thermal measurements.

Contribution

It introduces a novel dual-beam asymmetrical design and an analytical model to predict and optimize the torsional response for temperature sensing applications.

Findings

Analytical model accurately predicts device performance.

Device exhibits high sensitivity to temperature changes.

Fabrication procedure compatible with standard clean room equipment.

Abstract

An extremely sensitive temperature measurement MEMS device is developed based on the principle of structural deflection in a bi-material cantilever caused by a difference in thermal expansion coefficients. A dual-beam asymmetrical geometry is used to produce a torsional response from the device. An analytical model is developed to predict the performance and optimize the free parameters of the device. In this work, it is performed to analyze the flexural and torsional eigenfrequencies as well as confirm the theoretical predictions of DC and AC response. Lastly, a procedure is developed to allow fabrication of the device using equipment available in the Columbia University clean room.