Damping of optomechanical disks resonators vibrating in air

TL;DR

This paper investigates the vibrational behavior and air damping of miniature GaAs disk optomechanical resonators, providing models that accurately predict their mechanical modes and damping for fluidic environment applications.

Contribution

It introduces analytical models for air damping of disk resonators that match experimental observations, aiding design in fluidic environments.

Findings

Mechanical modes are accurately modeled by elasticity theory.

Air damping formulas match experimental damping measurements.

Models serve as design tools for optomechanical devices in fluids.

Abstract

We report on miniature GaAs disk optomechanical resonators vibrating in air in the radiofrequency range. The flexural modes of the disks are studied by scanning electron microscopy and optical interferometry, and correctly modeled with the elasticity theory for annular plates. The mechanical damping is systematically measured, and confronted with original analytical models for air damping. Formulas are derived that correctly reproduce both the mechanical modes and the damping behavior, and can serve as design tools for optomechanical applications in fluidic environment.