State Feedback Control for Adjusting the Dynamic Behavior of a Piezoactuated Bimorph Atomic Force Microscopy Probe
Bilal Orun, Serkan Necipoglu, Cagatay Basdogan, Levent Guvenc

TL;DR
This paper presents a state feedback control method to modify the dynamic response of a piezo-actuated bimorph AFM probe, allowing simultaneous adjustment of its quality factor and resonance frequency to improve scanning accuracy.
Contribution
It introduces a novel control approach for tuning the dynamic properties of AFM probes, enhancing their performance in scanning mode.
Findings
Reducing the quality factor decreases the probe's time constant.
Increasing the resonance frequency improves the probe's dynamic response.
The control method effectively reduces scan error in tapping mode AFM.
Abstract
We adjust the transient dynamics of a piezo-actuated bimorph Atomic Force Microscopy (AFM) probe using a state feedback controller. This approach enables us to adjust the quality factor and the resonance frequency of the probe simultaneously. First, we first investigate the effect of feedback gains on dynamic response of the probe and then show that the time constant of the probe can be reduced by reducing its quality factor and/or increasing its resonance frequency to reduce the scan error in tapping mode AFM.
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Taxonomy
TopicsForce Microscopy Techniques and Applications · Mechanical and Optical Resonators · Advanced MEMS and NEMS Technologies
