"Actuation at a distance" of microelectromechanical systems using photoelectrowetting: proof-of-concept

TL;DR

This paper demonstrates a novel method to actuate microelectromechanical systems remotely using photoelectrowetting, showing potential for wireless control of MEMS devices with light.

Contribution

It provides the first proof-of-concept experiment of MEMS actuation via photoelectrowetting, enabling remote optical control.

Findings

Achieved 56 μm deflection of a MEMS cantilever with white light.

Demonstrated actuation at a distance using photoelectrowetting.

Potential applications in wireless sensor control.

Abstract

We demonstrate here a proof-of-concept experiment that microelectromechanical systems (MEMS) can be actuated using photoelectrowetting. In order to demonstrate this, a 30 \mu m thick aluminum cantilever is actuated using an ordinary white light source. A deflection of 56 \mu m is observed using a light irradiance equal to \approx 1000 W m-2 at a bias of 7 V. The deflection of the cantilever relies on the recently observed photoelectrowetting effect [Sci. Rep.1, 184 (2011)]. Such "actuation at a distance" could be useful for optical addressing and control of autonomous wireless sensors, MEMS and microsystems.