Properties of MgB2 Films Grown at Various Temperatures by Hybrid Physical-Chemical Vapour Deposition
K. Chen, M. Veldhorst, C.H. Lee, D.R. Lamborn, R. DeFrain, J.M., Redwing, Q. Li, and X.X. Li

TL;DR
This study explores the properties of MgB2 films grown at various temperatures using hybrid physical-chemical vapor deposition, highlighting their superconducting characteristics and potential applications.
Contribution
It demonstrates the successful growth of superconducting MgB2 films at low temperatures and with significant thickness, advancing fabrication techniques for superconducting devices.
Findings
Superconducting MgB2 films with Tc0 of 35.5 K grown at 350°C
MgB2 films up to 4 μm thick with Jc over 10^6 A/cm^2 at 5 K
Low-temperature growth suitable for all-MgB2 tunnel junctions
Abstract
A Hybrid Physical-Chemical Vapour Deposition (HPCVD) system consisting of separately controlled Mg-source heater and substrate heater is used to grow MgB2 thin films and thick films at various temperatures. We are able to grow superconducting MgB2 thin films at temperatures as low as 350 C with a Tc0 of 35.5 K. MgB2 films up to 4 um in thickness grown at 550 C have Jc over 10E6 A/cm2 at 5 K and zero applied field. The low deposition temperature of MgB2 films is desirable for all-MgB2 tunnel junctions and MgB2 thick films are important for applications in coated conductors.
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