Integrated TiO2 resonators for visible photonics

TL;DR

This paper presents the design and fabrication of TiO2 racetrack resonators with high quality factors for visible light, demonstrating their potential for integrated visible photonics and quantum emitter coupling.

Contribution

It introduces waveguide-coupled TiO2 resonators with high quality factors fabricated via standard nanofabrication techniques for visible wavelengths.

Findings

Achieved loaded quality factors of 2x10^4 at visible wavelengths

Successfully fabricated TiO2 resonators on silicon substrates

Demonstrated potential for integration with quantum emitters

Abstract

We demonstrate waveguide-coupled titanium dioxide (TiO2) racetrack resonators with loaded quality factors of 2x10^4 for the visible wavelengths. The structures were fabricated in sputtered TiO2 thin films on oxidized silicon substrates using standard top-down nanofabrication techniques, and passively probed in transmission measurements using a tunable red laser. Devices based on this material could serve as integrated optical elements as well as passive platforms for coupling to visible quantum emitters.