Etching suspended superconducting hybrid junctions from a multilayer
Hung Q. Nguyen (NEEL), Laetitia Pascal (NEEL), Z. H. Peng (NEEL),, Olivier Buisson (NEEL), B. Gilles (SIMAP), Clemens Winkelmann (NEEL), Herv\'e, Courtois (NEEL)
TL;DR
This paper introduces a new fabrication method for high-quality, large-area superconducting hybrid tunnel junctions with suspended normal metal regions, demonstrating effective electronic cooling under bias.
Contribution
It presents a simple, reliable fabrication process combining lithography and etching to produce superior superconducting hybrid junctions with suspended components.
Findings
Successful fabrication of large-area suspended hybrid junctions
Demonstration of significant electronic cooling
High-quality tunnel junctions achieved
Abstract
A novel method to fabricate large-area superconducting hybrid tunnel junctions with a suspended central normal metal part is presented. The samples are fabricated by combining photo-lithography and chemical etch of a superconductor - insulator - normal metal multilayer. The process involves few fabrication steps, is reliable and produces extremely high-quality tunnel junctions. Under an appropriate voltage bias, a significant electronic cooling is demonstrated.
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Taxonomy
TopicsPhysics of Superconductivity and Magnetism · Superconducting and THz Device Technology · Superconducting Materials and Applications