Superior performance of multilayered fluoropolymer films in low voltage electrowetting
Dimitrios P. Papageorgiou, Angeliki Tserepi, Andreas G. Boudouvis,, Athanasios G. Papathanasiou

TL;DR
This study demonstrates that multilayered fluoropolymer films created via PECVD significantly enhance low-voltage electrowetting performance by resisting dielectric breakdown and material degradation, thereby improving device reliability and longevity.
Contribution
The paper introduces a novel multilayered fluoropolymer coating that improves electrowetting performance and durability at low voltages, surpassing traditional single-layer Teflon coatings.
Findings
Multilayered fluoropolymer films resist dielectric breakdown at high voltages.
Leakage current remains stable over multiple electrowetting cycles.
Composite coatings extend device lifetime and reliability.
Abstract
The requirement for low operational voltage in electrowetting devices, met using thin dielectrics, is usually connected with serious material failure issues. Dielectric breakdown (visible as electrolysis) is frequently evident slightly beyond the onset of the contact angle saturation. Here, plasma enhanced chemical vapor deposition (PECVD) is used to deposit thin fluorocarbon films prior to the spin-coating of Teflon\textregistered amorphous fluoropolymer on tetraethoxysilane (TEOS) substrates. The resulting multilayered hydrophobic top coating improves the electrowetting performance of the stack, by showing high resistance to dielectric breakdown at high applied voltages and for continuous long term application of DC and AC voltage. Leakage current measurements during electrowetting experiments with the proposed composite coating showed that current remains fairly constant at…
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