High-Q optomechanical GaAs nanomembranes

TL;DR

This paper introduces a straightforward fabrication process for suspended GaAs nanomembranes, demonstrating high mechanical quality factors and potential for quantum optomechanics applications.

Contribution

It presents a novel, simple fabrication method for large-area GaAs nanomembranes with high Q-factors suitable for quantum optomechanics.

Findings

Mechanical Q-factors up to 2,300,000 at room temperature

Multiple mechanical modes observed in the kilohertz range

Good agreement between mode profiles and taut rectangular drumhead model

Abstract

We present a simple fabrication method for the realization of suspended GaAs nanomembranes for cavity quantum optomechanics experiments. GaAs nanomembranes with an area of 1.36 mm by 1.91 mm and a thickness of 160 nm are obtained by using a two-step selective wet-etching technique. The frequency noise spectrum reveals several mechanical modes in the kilohertz regime with mechanical Q-factors up to 2,300,000 at room temperature. The measured mechanical mode profiles agree well with a taut rectangular drumhead model. Our results show that GaAs nanomembranes provide a promising path towards quantum optical control of massive nanomechanical systems.