Analysis of ellipsometric data obtained from curved surfaces

TL;DR

This paper analyzes the errors in ellipsometric measurements on curved surfaces, considering beam collimation effects, using a combined geometrical and wave optics model for a dielectric layer.

Contribution

It introduces a numerical model that combines geometrical and wave optics to evaluate ellipsometric data from curved surfaces, and compares three averaging methods.

Findings

Beam collimation significantly affects measurement accuracy.

The proposed model helps quantify errors in curved surface ellipsometry.

Different averaging methods vary in effectiveness depending on surface curvature.

Abstract

This article deals with quantitative error analysis resulting from ellipsometric data obtained from measurement on curved surfaces including the influence of non-collimated beams. Numerical model based on the combination of geometrical and wave optics is restricted to the example of single dielectric layer deposited on the substrate with complex index of refraction. Three methods for averaging measurable ellipsometric data are compared.