Formation of femtosecond laser induced surface structures on silicon : insights from numerical modeling and single pulse experiments

TL;DR

This paper investigates the formation of laser-induced surface structures on silicon using numerical modeling and single pulse experiments, revealing two distinct ripple formation regimes and emphasizing the role of surface plasmon polaritons.

Contribution

It provides new insights into the mechanisms of femtosecond laser-induced surface structuring on silicon through combined experimental and numerical analysis.

Findings

Identification of two ripple formation regimes at low pulse numbers

Good correlation between numerical simulations and experiments

Surface plasmon polariton mechanism plays a key role

Abstract

Laser induced periodic surface structures (LIPSS) are formed by multiple irradiation of femtosecond laser on a silicon target. In this paper, we focus and discuss the surface plasmon polariton mechanism by an analysis of transient phase-matching conditions in Si on the basis of a single pulse experiment and numerical simulations. Two regimes of ripple formation mechanisms at low number of shots are identified and detailed. Correlation of numerical and experimental results is good.