Electrical transport properties of graphene on SiO2 with specific surface structures

TL;DR

This study investigates how specific surface structures on SiO2, created by plasma and reoxidization, influence the electrical transport properties of transferred graphene, aiming to improve its mobility.

Contribution

It elucidates the relationship between SiO2 surface treatments and graphene's electrical properties, which was previously not well understood.

Findings

Surface treatments alter SiO2 surface chemistry and structure.

Graphene mobility is affected by the SiO2 surface structure.

Reoxidization improves graphene's electrical transport properties.

Abstract

The mobility of graphene transferred on a SiO2/Si substrate is limited to ~10,000 cm2/Vs. Without understanding the graphene/SiO2 interaction, it is difficult to improve the electrical transport properties. Although surface structures on SiO2 such as silanol and siloxane groups are recognized, the relation between the surface treatment of SiO2 and graphene characteristics has not yet been elucidated. This paper discusses the electrical transport properties of graphene on specific surface structures of SiO2 prepared by O2-plasma treatments and reoxidization.